Built for precision science
What drives us
UPVfab is a 500m² ISO-7 (Class 10,000) cleanroom at the Universitat Politècnica de València. We provide microfabrication services for SiN photonics and its hybridization with III-V materials, supporting frontend and backend wafer processing for integrated photonics and semiconductor devices.
UPVfab was conceived as a reference custom microfabrication foundry for academic research groups and industrial companies requiring a trusted, well-equipped partner for semiconductor and photonic chip development.
The facility bridges the gap between laboratory research and industrial deployment, offering pilot-production grade tools alongside deep process expertise in silicon nitride, photonics, MEMS, and chemical engineering.
From low TRL exploratory R&D through to TRL-6 pilot scale demonstrations, UPVfab provides a single environment where researchers and resident companies can grow their technology without switching venues.










Micro and nanofabrication (MNF) technologies are key for many application domains at very different TRLs: from research to market
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MNF techs enable miniaturized, rugged, stable, low-power consumption products that can be brought from research to mass manufacturing
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UPV is a leading Spanish university with world-wide reputed groups in: tele/datacom, instrumentation, environmental sensing, chemistry, bio/life sciences, food & drug analysis among other
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Former solar cell manufacturing company Siliken established a 500 m2 class 100-10000 (ISO-5/7) 6’’ MEMS pilot line clean room at Ciudad Politècnica de la Innovación – Universitat Politècnica de València (UPV)
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After Siliken stopped operations, UPV owns the clean room which was operated by industrial agents since 2015
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From 2018, the clean room is operated by UPV personnel as UPVfab
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2009-2012
2015-2017
2017-2018
2018-2025
Since 2025
Five institutes, one facility
Institute of Telecommunications and Multimedia Applications
Home of the Photonics Research Labs, leading work on photonic integrated circuits, silicon nitride technologies, and advanced PIC test engines. UPVfab cleanrooms are part of iTEAM’s research infrastructure.
Institute of Chemical Technology (UPV-CSIC)
Joint institute with Spain’s national research council CSIC. Active in fuel cells, ionic membranes, combinatorial catalysis, and advanced materials — using UPVfab process lines for nanostructured device development.
Institute of Instrumentation for Molecular Imaging (UPV-CSIC)
Develops advanced instrumentation and detectors for molecular imaging applications in healthcare and life sciences, leveraging microfabrication for sensor and MEMS development.
CI2B — Centre for Research and Innovation in Bioengineering
Focuses on microfluidics, biosensors, and lab-on-chip systems at the intersection of engineering and biomedical research — using UPVfab cleanrooms for device prototyping and small-series fabrication.
Inter-University Institute for Research in Molecular Recognition and Technological Development (UPV-UV)
Joint initiative between UPV and the University of Valencia (UV), focused on molecular recognition technologies, smart materials, and chemical sensors with applications in environmental monitoring and diagnostics.